ESR in diamond thin films synthesized by microwave plasma chemical vapor deposition

被引：0
|
作者：
Watanabe, Ichiro [1 ]
Sugata, Ken [1 ]
机构：
[1] Kanazawa Univ, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1988年 / 27卷 / 10期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
15
引用
收藏
页码：1808 / 1811
相关论文
共 50 条
  • [41] Growth and morphological studies of (100) textured diamond thin films by microwave plasma-enhanced chemical vapor deposition
    Yang, BX
    Zhu, Y
    Ahn, J
    Tan, HS
    Lu, D
    [J]. THIN SOLID FILMS, 1995, 270 (1-2) : 210 - 214
  • [42] Characterization of diamond-like carbon thin films prepared by a microwave plasma enhanced chemical vapor deposition method
    Choi, WS
    Chung, I
    Lee, YZ
    Hong, BY
    [J]. SURFACE & COATINGS TECHNOLOGY, 2004, 180 : 254 - 258
  • [43] MICROWAVE PLASMA ASSISTED CHEMICAL VAPOR-DEPOSITION OF DIAMOND
    VANDENBULCKE, L
    BOU, P
    HERBIN, R
    CHOLET, V
    BENY, C
    [J]. JOURNAL DE PHYSIQUE, 1989, 50 (C-5): : 177 - 188
  • [44] Textured diamond growth by microwave plasma chemical vapor deposition
    Liou, Y
    [J]. APPLIED SURFACE SCIENCE, 1996, 92 (1-4) : 115 - 118
  • [45] GROWTH OF DIAMOND THIN-FILMS BY DC PLASMA CHEMICAL VAPOR-DEPOSITION
    SUZUKI, K
    SAWABE, A
    YASUDA, H
    INUZUKA, T
    [J]. APPLIED PHYSICS LETTERS, 1987, 50 (12) : 728 - 729
  • [46] Paramagnetic defects in textured diamond films synthesized by chemical vapor deposition
    Kawaguchi, Y
    Watanabe, I
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2000, 39 (4A): : 1861 - 1865
  • [47] tructure and Composition of Crystalline Carbon Nitride Films Synthesized by Microwave Plasma Chemical Vapor Deposition
    Yongping Zhang
    [J]. International Journal of Minerals,Metallurgy and Materials, 2000, (04) : 282 - 285
  • [48] Structure and composition of crystalline carbon nitride films synthesized by microwave plasma chemical vapor deposition
    Zhang, YP
    Gu, YS
    Chang, XT
    Tian, ZZ
    Zhang, XF
    [J]. JOURNAL OF UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING, 2000, 7 (04): : 282 - 285
  • [49] On the structure and composition of crystalline carbon nitride films synthesized by microwave plasma chemical vapor deposition
    Zhang, YP
    Gu, YS
    Chang, XR
    Tian, ZZ
    Shi, DX
    Zhang, XF
    [J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2000, 78 (01): : 11 - 15
  • [50] Structure and composition of crystalline carbon nitride films synthesized by microwave plasma chemical vapor deposition
    Zhang, Yongping
    Gu, Yousong
    Chang, Xiangrong
    Tian, Zhongzhuo
    Zhang, Xiufang
    [J]. 2000, University of Science and Technology Beijing, Beijing, China (07):
12345