Knowledge acquisition from batch semiconductor manufacturing data

被引：1
|
作者：
Del Castillo Sobrino, M. Dolores [1 ]
Barrios Bravo, Luis J. [1 ]
机构：
[1] Instituto de Automatica Industrial, N-IIL Krn. 22, 8. Desvio la Poveda, 28500 Arganda del Rey, Madrid, Spain
来源：
Intelligent Data Analysis | 1999年 / 3卷 / 05期
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摘要：
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页码：399 / 408
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