Application of electron-energy loss spectroscopy in characterizing diamond-like carbon film

被引：0
|
作者：
Wang, Weijie [1 ]
Cai, Yong [1 ]
Wang, Tianmin [1 ]
机构：
[1] Lanzhou Univ, Lanzhou, China
来源：
Weixi Jiagong Jishu/Microfabrication Technology | 1993年 / 04期
关键词：
Carbon - Diamonds - Electron spectroscopy - Energy dissipation;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Diamond-like carbon film has the advantages of high hardness, low friction coefficient, high infrared penetrability and good chemical inertness, so that it would be widely used in protection film, antireflection coating layer, high temperature semiconductor and thin-layer capacitor. Electron-energy loss spectroscopy can be used to receive electronic information by measuring the electron-energy loss. This paper described the structural characteristics of diamond-like film and the principle and classification of electron-energy loss spectroscopy and introduced the application of electron-energy loss spectroscopy in characterizing diamond-like carbon film (and some diamond films).
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页码：13 / 22
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