Advanced materials analysis techniques for nanoelectronics

被引：0
|
作者：
Kubodera, Ken'ichi [1 ]
Maruo, Tetsuya [1 ]
Kurosawa, Satoru [1 ]
Ikeda, Kousuke [1 ]
机构：
[1] NTT Interdisciplinary Laboratories
来源：
NTT R and D | 1996年 / 45卷 / 03期
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页码：261 / 264
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