ION BEAM MIXING IN Al/Fe MULTILAYERED THIN FILMS.

被引：0

作者：

Rauschenbach, B. ^{[1
]}

Hohmuth, K. ^{[1
]}

机构：

[1] Akad der Wissenschaften der DDR, Dresden, East Ger, Akad der Wissenschaften der DDR, Dresden, East Ger

来源：

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1987年 / B23卷 / 03期

关键词：

ION BEAMS - RADIATION EFFECTS;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Ion beam-induced mixing of Al/Fe multilayered thin films was studied by means of electron microscopy and Auger electron spectroscopy. Ion mixing was performed with Xe**30 -ions at room temperature with doses ranging from 5 multiplied by 10**1**5 to 3 multiplied by 10**1**6 ions/cm**2. The Auger concentration depth profiles showed that atomic mixing occurred at the interface and that oxygen at the interface reduced the mixing efficiency. An amorphous phase, solid solutions and different metastable and stable crystalline phases were obtained after atomic mixing in dependence on initial composition and thermal annealing conditions. The amorphous phase was transformed into the quasicrystalline state with sharp diffraction spots.

引用

页码：323 / 328

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