Direct nanomolding of semiconductor single crystals

被引：0
|
作者：
Masuda, Hideki [1 ]
Yasui, Kenji [1 ]
Yanagishita, Takashi [1 ]
Nakao, Masashi [2 ]
Tamamura, Toshiaki [3 ]
Nishio, Kazuyuki [1 ]
机构：
[1] Department of Applied Chemistry, School of Engineering, Tokyo Metropolitan University, 1-1 Minamiosawa, Hachioji, Tokyo 192-0397, Japan
[2] NTT Photonics Laboratory, 3-1 Morinosato-Wakamiya, Atsugi, Kanagawa 243-0198, Japan
[3] NTT Basic Research Laboratory, 3-1 Morinosato-Wakamiya, Atsugi, Kanagawa 243-0198, Japan
来源：
Japanese Journal of Applied Physics, Part 2: Letters | 2000年 / 39卷 / 3 A/B期
关键词：
Direct nanomolding - Semiconductor single crystals;
D O I：
10.1143/jjap.39.l256
中图分类号：
学科分类号：
摘要：
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