High-precision alignment servo of planar microlens array

被引：0
|
作者：
Okada, Yohji
Ueda, Yugo
Ueda, Yoshiaki
Nakamura, Masayuki
Hamanaka, Kenjiro
机构：
来源：
Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C | 1993年 / 59卷 / 560期
关键词：
Optical communication equipment;
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摘要：
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页码：1103 / 1108
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