Micromachined surface work-function gas sensor for low-pressure oxygen detection

被引：0
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作者：
Bergstrom, P.L. [1 ]
Patel, S.V. [1 ]
Schwank, J.W. [1 ]
Wise, K.D. [1 ]
机构：
[1] The Univ of Michigan, Ann Arbor, United States
来源：
Sensors and Actuators, B: Chemical | 1997年 / B42卷 / 03期
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页码：195 / 204
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