Development of electrothermal actuator with optimized motion characteristics

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[1] Lai, Yen-Jyh
[2] Lee, Chengkuo
[3] Wu, Chia-Yu
[4] Chen, Wen-Chih
[5] Chen, Chihchung
[6] Lin, Yu-Shen
[7] Fang, Weileun
[8] Huang, Ruey-Shing
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Lee, C. (mems@apmsinc.com) | 1600年 / Japan Society of Applied Physics卷 / 42期
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