Two-dimensional etching diagrams for z-cut quartz

被引：0
|
作者：
Hedlund, Christer [1 ]
Bucht, Urban [1 ]
Soderkvist, Jan [1 ]
机构：
[1] Univ of Uppsala, Uppsala, Sweden
来源：
Journal of Micromechanics and Microengineering | 1992年 / 2卷 / 03期
关键词：
Etching;
D O I：
10.1088/0960-1317/2/3/025
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：215 / 217
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