Spectroscopic optical emission tomography of direct-current magnetron sputtering discharges in argon-nitrogen gas mixtures

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作者：
Debal, F. [1 ]
Wautelet, M. [1 ]
Dauchot, J.P. [1 ]
Hecq, M. [1 ]
机构：
[1] Universite de Mons-Hainaut, Mons, Belgium
来源：
Surface and Coatings Technology | 1999年 / 116卷
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页码：927 / 932
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