Fe/Cu MULTILAYERED THIN FILMS BY RF-MAGNETRON SPUTTERING METHOD.

被引：0
|
作者：
Kozono, Y. [1 ]
Komuro, M. [1 ]
Narishige, S. [1 ]
Hanazono, M. [1 ]
机构：
[1] Hitachi Ltd, Jpn, Hitachi Ltd, Jpn
来源：
IEEE translation journal on magnetics in Japan | 1985年 / TJMJ-2卷 / 02期
关键词：
IRON-COPPER MULTILAYERED THIN FILMS - RF-MAGNETRON SPUTTERING - STRUCTURE/MAGNETIC PROPERTIES;
D O I：
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中图分类号：
学科分类号：
摘要：
The relationship between structure and magnetic properties of Fe/Cu multilayered films grown by the sputtering method in which the Fe and Cu in the system did not have a tendency to form solid solutions with respect to one another is investigated. Auger electron spectroscopy analysis and transmission electron microscopy observation showed that these films were periodic multilayered structures. As the thickness of a single layer decreased, the coercivity decreased, and single-axis anisotropy in the plane was observed clearly.
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页码：183 / 184
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