Wave polymerization during vapor deposition of porous parylene-N dielectric films

被引：0
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作者：
Erjavec, James [1 ]
Sikita, John [1 ]
Beaudoin, Stephen P. [1 ]
Raupp, Gregory B. [1 ]
机构：
[1] Department of Chemical, Bio, and Materials Engineering, Arizona State University, Mail Code 6006, Tempe, AZ 85287-6006, United States
来源：
Materials Research Society Symposium - Proceedings | 1999年 / 565卷
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页码：23 / 28
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