Fabrication of micro-optical elements in fused silica with laser backside etching

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[1] Böhme, Rico
[2] Zimmer, Klaus
[3] Rauschenbach, Bernd
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| / Japan Society of Mechanical Engineers (JSME),; Japan Society of Mechanical Engineers (JSME),; Manufacturing and Machine Tool Division; Manufacturing System Division卷 / Japan Society of Mechanical Engineers期
关键词：
708.1 Dielectric Materials - 744.9 Laser Applications - 812.3 Glass;
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