Precision measurement on the diameter of thin thread by using the diffraction method

被引:0
|
作者
Zhu, Jigui [1 ]
Ye, Shenghua [1 ]
Tao, Guozhi [1 ]
机构
[1] Tianjin Univ, Tianjin, China
来源
| 1996年 / 23期
关键词
Diffractometers - Laser applications;
D O I
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中图分类号
学科分类号
摘要
An analysis was made on the important factors that affect the accuracy in measuring the diameter of thin thread through using the laser diffraction theory, and on this basis, an accurate processing and recognizing technique was developed for the weak diffraction fringes to effectively improve the measurement accuracy. The experimental results show that the repetition accuracy of ±0.1 μm can be realized within the range of 10-50 μm with the discussed technique, and the resolution is better than 0.01μm.
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