Development of in-situ method for measurements of size and density of small particles in SiH4 rf discharges

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作者：
Fukuzawa, Tsuyoshi
Miyahara, Hiroomi
Kushima, Shinji
Kawasaki, Hiroharu
Shiratani, Masaharu
Watanabe, Yukio
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Research Reports on Information Science and Electrical Engineering of Kyushu University | 1998年 / 3卷 / 01期
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页码：117 / 124
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