RESISTIVITY OF THIN METAL FILMS.

被引：0
|
作者：
Chaurasia, H.K.
Voss, W.A.G.
机构：
来源：
| 1600年 / MTT-2期
关键词：
FILMS; -; Metallic;
D O I：
10.1109/tmtt.1973.1127915
中图分类号：
学科分类号：
摘要：
It is shown that the sheet resistance, and hence the resistivity, of metal films less than 100 A thick can be determined conveniently and accurately by microwave measurements. Accuracy is limited by VSWR measurement, film-holder design, and short-circuit quality. Dc and microwave resistivity measurements are given for gold films on cleaved mica.
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