Common path laser heterodyne interferometer for on-line measuring surface roughness

被引：0
|
作者：
Liang, Rong [1 ]
Li, Dacheng [1 ]
Cao, Mang [1 ]
Zhao, Hongzhi [1 ]
Wu, Yongjun [1 ]
机构：
[1] Tsinghua Univ, Beijing, China
来源：
Guangxue Xuebao/Acta Optica Sinica | 1999年 / 19卷 / 07期
关键词：
Focusing - Semiconductor lasers - Surface roughness;
D O I：
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学科分类号：
摘要：
A novel laser heterodyne interferometer for on-line measuring surface roughness was developed. It features compact volume (25 cm × 20 cm × 10 cm) and excellent immunity to environmental disturbance. The system employs a frequency-stabilized laser diode. The design of common path makes the measuring beam and reference beam incident on the surface along the same way. The processing method of heterodyne signals combines integer measurement with fraction period measurement, with fraction period measurement, so it has wide dynamic range and high resolution. Critical angle method was used for automatic focusing.
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页码：958 / 961
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