共 50 条
- [22] Wafer Bifurcation as a Spontaneous Symmetry Breaking 2022 23RD INTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (EUROSIME), 2022,
- [26] LONGITUDINAL ELASTIC STRESS WAVES DUE TO IMPACT. Engineering (London), 1977, 217 (02): : 106 - 108
- [28] Si(004) measurements of wafer curvature due to the stress introduced by PECVD/HDP SiN films in wafer fabrication 2017 IEEE 24TH INTERNATIONAL SYMPOSIUM ON THE PHYSICAL AND FAILURE ANALYSIS OF INTEGRATED CIRCUITS (IPFA), 2017,