Forming peculiarities of tungsten films produced by ion-plasma sputtering method

被引：0
|
作者：
Koz'ma, A.A. [1 ]
Malykhin, S.V. [1 ]
Sobol', O.V. [1 ]
Borisova, S.S. [1 ]
Podtelezhnikov, A.A. [1 ]
机构：
[1] Khar'kovskij Gosudarstvennyj, Politekhnicheskij Univ, Khar'kov, Ukraine
来源：
Fizika i Khimiya Obrabotki Materialov | 1998年 / 03期
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摘要：
12
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页码：49 / 55
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