Angular distribution of atoms sputtered from a target by normally incident ion beam

被引：0

作者：

Tolmachev, A.I. ^{[1
]}

机构：

[1] TITAN Research Inst, Moscow, Russia

来源：

Physics, chemistry and mechanics of surfaces | 1995年 / 10卷 / 12期

关键词：

Atoms - Computer simulation - Ion bombardment - Ions - Numerical methods - Sputtering - Targets;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

The theory of the angular distribution of atoms self-sputtered from a target is generalized to describe the case of arbitrary mass ratio of the projectile ions and target atoms. The result was obtained by approximate solution of the Boltzmann equation using the method of discrete fluxes. A good agreement between theory and computer simulation results is demonstrated.

引用

页码：1355 / 1360

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