Angular distribution of atoms sputtered from a target by normally incident ion beam

被引：0
|
作者：
Tolmachev, A.I. [1 ]
机构：
[1] TITAN Research Inst, Moscow, Russia
来源：
Physics, chemistry and mechanics of surfaces | 1995年 / 10卷 / 12期
关键词：
Atoms - Computer simulation - Ion bombardment - Ions - Numerical methods - Sputtering - Targets;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The theory of the angular distribution of atoms self-sputtered from a target is generalized to describe the case of arbitrary mass ratio of the projectile ions and target atoms. The result was obtained by approximate solution of the Boltzmann equation using the method of discrete fluxes. A good agreement between theory and computer simulation results is demonstrated.
引用
收藏
页码：1355 / 1360
相关论文
共 50 条
  • [1] ANGULAR-DISTRIBUTION OF ATOMS SPUTTERED FROM SURFACE OF AMORPHOUS TARGET
    PLETNEV, VV
    FIZIKA TVERDOGO TELA, 1978, 20 (11): : 3379 - 3384
  • [2] ANGULAR DISTRIBUTION OF Ag ATOMS SPUTTERED WITH A 5 keV Ar + ION BEAM.
    Szymonski, Marek
    Huang, Weixing
    Onsgaard, Jens
    Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1986, B14 (03) : 263 - 267
  • [3] On the angular distributions of atoms sputtered by gas cluster ion beam
    Nazarov, Anton V.
    Zavilgelskiy, Andrey D.
    Ieshkin, Alexey E.
    Kireev, Dmitriy S.
    Shemukhin, Andrey A.
    Chernysh, Vladimir S.
    Nordlund, Kai
    Djurabekova, Flyura
    VACUUM, 2023, 212
  • [4] Angular distribution of atoms sputtered from alloys
    Chernysh, V. S.
    Patrakeev, A. S.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2012, 270 : 50 - 54
  • [5] THE ANGULAR-DISTRIBUTION OF ATOMS SPUTTERED FROM A GA-IN EUTECTIC ALLOY TARGET
    HUBBARD, KM
    WELLER, RA
    WEATHERS, DL
    TOMBRELLO, TA
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 36 (04): : 395 - 403
  • [6] ANGULAR DISTRIBUTION OF ATOMS SPUTTERED FROM MONOCRYSTALLINE GOLD
    CHAPMAN, GE
    KELLY, JC
    AUSTRALIAN JOURNAL OF PHYSICS, 1967, 20 (03): : 283 - &
  • [7] Angular distribution of the sputtered atoms from TbFeCo targets
    1600, American Inst of Physics, Woodbury, NY, USA (74):
  • [8] ANGULAR-DISTRIBUTION OF AG ATOMS SPUTTERED WITH A 5 KEV AR+ ION-BEAM
    SZYMONSKI, M
    HUANG, WX
    ONSGAARD, J
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 14 (03): : 263 - 267
  • [9] Angular distribution of self-sputtered atoms at normal ion incidence
    Tolmachev, A.I.
    Poverkhnost Fizika Khimiya Mekhanika, 1994, (03): : 40 - 43
  • [10] Anisotropic angular distribution of sputtered atoms
    Zhang, ZL
    Zhang, L
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 2004, 159 (05): : 301 - 307
12345