共 50 条
- [31] Model calculation of the charge composition of a plasma in a vacuum-arc discharge with a composite cathode Technical Physics Letters, 2015, 41 : 500 - 503
- [34] Boron ion implantation into silicon by use of the boron vacuum-arc plasma generator ION IMPLANTATION TECHNOLOGY, 2006, 866 : 261 - +
- [35] Vacuum arc ion sources:: Charge state enhancement and arc voltage EMERGING APPLICATIONS OF VACUUM-ARC PRODUCED PLASMA, ION AND ELECTRON BEAMS, 2002, 88 : 123 - 130
- [36] On the relation of the ion velocity to the ion charge in the vacuum arc plasma. ISDEIV: XIXTH INTERNATIONAL SYMPOSIUM ON DISCHARGES AND ELECTRICAL INSULATION IN VACUUM, VOLS 1 AND 2, PROCEEDINGS, 2000, 19 : 256 - 259
- [37] METAL PLASMA IMMERSION ION-IMPLANTATION AND DEPOSITION USING VACUUM-ARC PLASMA SOURCES JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (02): : 815 - 820
- [40] Recent study of ion charge state in vacuum arc ion sources ISDEIV: XVIIITH INTERNATIONAL SYMPOSIUM ON DISCHARGES AND ELECTRICAL INSULATION IN VACUUM - PROCEEDINGS, VOLS 1 AND 2, 1998, 18 : 254 - 259