Optical quality micromachining of glass with focused laser-produced metal plasma etching in the atmosphere

被引：0
|
作者：
Li, Chengde [1 ]
Nikumb, Suwas [1 ]
机构：
[1] Intgd. Mfg. Technologies Institute, National Research Council of Canada, London, Ont. N6G 4X8, Canada
来源：
Applied Optics | 2003年 / 42卷 / 13期
关键词：
Optical quality;
D O I：
10.1364/ao.42.002383
中图分类号：
学科分类号：
摘要：
引用
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页码：2383 / 2387
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