Gas-sensitive electrical properties of pure and doped semiconducting Ga2O3 thick films

被引:0
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作者
Frank, J. [1 ]
Fleischer, M. [1 ]
Meixner, H. [1 ]
机构
[1] Siemens AG, Munich, Germany
来源
Sensors and Actuators, B: Chemical | 1998年 / B48卷 / 1 -3 pt 4期
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页码:318 / 321
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