Effect of oxygen and supply rate of mist on the preparation of Y-Ba-Cu-O superconducting thin films by the mist microwave-plasma chemical vapor deposition method

The effect of the input molar ratio of oxygen (OR) and supply rate of mist on the preparation of Y-Ba-Cu-O superconducting thin films by the MPCVD method have been investigated. Although the preparation of Y-Ba-Cu-O superconducting thin films was attempted at the input molar ratio of oxygen OR= FO(2)/(FO(2) + total FAr) from 0.1 to 0.8, the Y-Ba-Cu-O superconducting phase was formed only in the narrow range of OR from 0.1 to 0.3. In addition, the formation of the Y-Ba-Cu-O superconducting phase was limited not only by the input molar ratio of oxygen but by the supply rate of mist.