Effect of oxygen and supply rate of mist on the preparation of Y-Ba-Cu-O superconducting thin films by the mist microwave-plasma chemical vapor deposition method

被引：0

作者：

机构：

[1] Takahashi, Naoyuki

[2] Kosaka, Akinori

[3] Koukitu, Akinori

[4] Seki, Hisashi

来源：

Takahashi, Naoyuki | 1600年 / JJAP, Minato-ku, Japan卷 / 33期

关键词：

Chemical vapor deposition - Composition effects - Diffractometers - Electric conductivity measurement - Film growth - Film preparation - Magnesia - Microwave devices - Oxygen - Ultrasonic devices - X ray diffraction - Yttrium compounds;

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摘要：

The effect of the input molar ratio of oxygen (OR) and supply rate of mist on the preparation of Y-Ba-Cu-O superconducting thin films by the MPCVD method have been investigated. Although the preparation of Y-Ba-Cu-O superconducting thin films was attempted at the input molar ratio of oxygen OR= FO(2)/(FO(2) + total FAr) from 0.1 to 0.8, the Y-Ba-Cu-O superconducting phase was formed only in the narrow range of OR from 0.1 to 0.3. In addition, the formation of the Y-Ba-Cu-O superconducting phase was limited not only by the input molar ratio of oxygen but by the supply rate of mist.

引用

共 50 条

[1] THE EFFECT OF OXYGEN AND SUPPLY RATE OF MIST ON THE PREPARATION OF Y-BA-CU-O SUPERCONDUCTING THIN-FILMS BY THE MIST MICROWAVE-PLASMA CHEMICAL-VAPOR-DEPOSITION METHOD
TAKAHASHI, N
KOSAKA, A
KOUKITU, A
SEKI, H
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1994, 33 (11B): : L1584 - L1587
[2] PREPARATION OF Y-BA-CU-O SUPERCONDUCTING THIN-FILMS BY THE MIST MICROWAVE PLASMA DECOMPOSITION METHOD
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[5] As-grown preparation of Ag-doped Y-Ba-Cu-O superconducting thin films by mist microwave plasma chemical vapour deposition
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[10] Growth of NdBaCuO superconducting thin films using mist microwave-plasma chemical vapor deposition with dual sources
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