Electrical reliability and structural inhomogeneity of thermally grown SiO2

被引：0
|
作者：
Toriumi, A. [1 ]
Satake, H. [1 ]
Yasuda, N. [1 ]
Tanamoto, T. [1 ]
机构：
[1] Toshiba Corp, Kawasaki, Japan
来源：
Applied Surface Science | 1997年 / 117-118卷
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摘要：
9
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页码：230 / 236
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