Research on central obscuration in Mirau phase-shifting interferometry

被引：0
|
作者：
Zhang, Hong-Xia [1 ]
Zhang, Yi-Mo [1 ]
Jing, Wen-Cai [1 ]
Zhou, Ge [1 ]
Li, Zhao-Hui [1 ]
机构：
[1] Lab. of Opto-electron. Info., Sch. of Precision Instrum., Tianjin Univ., Tianjin 300072, China
来源：
Guangdianzi Jiguang/Journal of Optoelectronics Laser | 2004年 / 15卷 / 10期
关键词：
Aberrations - Interferometry - Optical instrument lenses - Optical transfer function - Phase shift;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The reference plate in Mirau phase-shifting interferometry is a central obscuration in the beam. The relations of field of view, Strehl criterion, resolution limitation, modulation transfer function (MTF) and remainder aberration to central obscuration are analyzed theoretic and the allowable diameter of reference plate is 0.8-1.28 mm. The Mirau interference objective is developed with the diameter of reference plate D=1 mm and central obscuration coefficient Ε=0.129. The value in MTF is changed less than 6% and allowable remainder aberration is 0.978 compared with the objective without central obscuration.
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页码：1218 / 1221
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