Physico-chemical investigation of Pt-Si system with SIMS and AES

被引：0
|
作者：
Josepovits, V.K. [1 ]
Biczo, I. [1 ]
机构：
[1] Technical Univ of Budapest, Budapest, Hungary
来源：
Vacuum | 1990年 / 40卷 / 1-2期
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D O I：
10.1016/0042-207x(90)90197-7
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