共 50 条
- [44] Stability of wafer level vacuum encapsulated single-crystal silicon resonators [J]. TRANSDUCERS '05, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2005, : 916 - 919
- [46] MICROSTRUCTURE OF SINGLE-CRYSTAL TITANIUM CARBIDE [J]. JOURNAL OF THE LESS-COMMON METALS, 1967, 12 (06): : 429 - &
- [47] Investigation on Electrical Enhanced Photocatalysis Polishing of Single-Crystal Silicon Carbide Substrates [J]. International Journal of Precision Engineering and Manufacturing, 2022, 23 : 1261 - 1274
- [48] Investigation of increased removal rate during polishing of single-crystal silicon carbide [J]. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2015, 80 (9-12): : 1511 - 1520
- [49] Single-crystal Silicon Carbide: A Biocompatible and Hemocompatible Semiconductor for Advanced Biomedical Applications [J]. B - SILICON CARBIDE 2010-MATERIALS, PROCESSING AND DEVICES, 2010, 1246
- [50] Infrared spectroscopy of silicon carbide layers synthesized by the substitution of atoms on the surface of single-crystal silicon [J]. Physics of the Solid State, 2015, 57 : 2543 - 2549