Preparation and structure analysis of amorphous carbon nitride films

被引：0
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作者：
Zhang, Guifeng [1 ]
Zhang, Jianhong [1 ]
Geng, Dongsheng [1 ]
Liu, Zhengtang [1 ]
Zheng, Xiulin [1 ]
机构：
[1] Northwestern Polytechnical Univ, Xi'an, China
来源：
Cailiao Gongcheng/Journal of Materials Engineering | 1997年 / 03期
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页码：10 / 12
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