Preparation and structure analysis of amorphous carbon nitride films

被引：0
|
作者：
Zhang, Guifeng [1 ]
Zhang, Jianhong [1 ]
Geng, Dongsheng [1 ]
Liu, Zhengtang [1 ]
Zheng, Xiulin [1 ]
机构：
[1] Northwestern Polytechnical Univ, Xi'an, China
来源：
Cailiao Gongcheng/Journal of Materials Engineering | 1997年 / 03期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
下载
收藏
页码：10 / 12
相关论文
共 50 条
  • [1] Amorphous carbon nitride films:: Structure and electrical properties
    Radnóczi, G
    Sáfrán, G
    Kovács, I
    Geszti, O
    Bíró, L
    ACTA PHYSICA SLOVACA, 2000, 50 (06) : 679 - 684
  • [2] Structure of amorphous carbon-nitride thin films
    Radnóczi, G
    Kovács, I
    Geszti, O
    Bíró, LP
    Sáfrán, G
    SURFACE & COATINGS TECHNOLOGY, 2002, 151 : 133 - 137
  • [3] Preparation of fluorinated amorphous carbon nitride films by magnetron sputtering
    Yokomichi, H
    SURFACE ENGINEERING, 2000, 16 (03) : 229 - 233
  • [4] Raman scattering spectroscopy of structure of amorphous carbon nitride films
    Ohkawara, Y
    Akasaka, H
    Namiki, KC
    Ohshio, S
    Ito, H
    Saitoh, H
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2003, 42 (01): : 254 - 258
  • [5] Effects of deposition temperature on the structure of amorphous carbon nitride films
    Therasse, M
    Benlahsen, M
    SOLID STATE COMMUNICATIONS, 2004, 129 (02) : 139 - 142
  • [6] Structure and elastic properties of amorphous silicon carbon nitride films
    Lehmann, G
    Hess, P
    Wu, JJ
    Wu, CT
    Wong, TS
    Chen, KH
    Chen, LC
    Lee, HY
    Amkreutz, M
    Frauenheim, T
    PHYSICAL REVIEW B, 2001, 64 (16) : 1653051 - 16530510
  • [7] Quantitative analysis of hydrogen in amorphous films of hydrogenated carbon nitride
    Ohkawara, Y
    Ohshio, S
    Suzuki, T
    Ito, H
    Yatsui, K
    Saitoh, H
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2001, 40 (12): : 7007 - 7012
  • [8] Influence of ions energy on the bonding structure of amorphous carbon nitride films
    Wei, AX
    Chen, DH
    Zhou, YG
    Lin, PX
    Yang, ZH
    Fan, JH
    MATERIALS CHEMISTRY AND PHYSICS, 2001, 70 (02) : 245 - 248
  • [9] The effect of annealing on the structure of cathodic are deposited amorphous carbon nitride films
    McCulloch, DG
    Merchant, AR
    THIN SOLID FILMS, 1996, 290 : 99 - 102
  • [10] Electronic structure and field emission from amorphous carbon nitride films
    Xanthakis, JP
    SOLID-STATE ELECTRONICS, 2001, 45 (06) : 945 - 948
12345