Influence of oxygen on polycrystalline silicon crystal for solar cells

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[1] Hide, I.
[2] Matsuyama, T.
[3] Suzuki, M.
[4] Yamashita, H.
[5] Suzuki, T.
[6] Moritani, T.
[7] Maeda, Y.
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Oxygen - Solar Cells--Silicon;
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摘要
The influence of oxygen on the characteristics of polycrystalline silicon sheets for solar cells, produced by the spin cast method, has been investigated. It was confirmed that if the oxygen concentration was more than 7.5 × 1017 atoms/cm3, after the cell fabrication process, the resistivity of the crystal became higher than before cell fabrication process. To obtain solar cells which have an energy conversion efficiency of more than 10%, the oxygen content should be less than 7.5 × 1017 atoms/cm3.
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