Diagnostics of SF6 plasmas by energy-resolved mass spectrometry: influence of the electrode material on internal plasma parameters

被引：0
|
作者：
Univ of Kassel, Kassel, Germany [1 ]
机构：
来源：
Surf Coat Technol | / 1卷 / 51-55期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 24 条
  • [1] Diagnostics of SF6 plasmas by energy-resolved mass spectrometry:: influence of the electrode material on internal plasma parameters
    Nöding, M
    Becker, F
    Kassing, R
    [J]. SURFACE & COATINGS TECHNOLOGY, 1999, 111 (01): : 51 - 55
  • [2] TIME-RESOLVED MASS-SPECTROMETRY ON A SF6 ARC
    RUEGSEGGER, W
    MEIER, R
    SCHOTZAU, HJ
    KNEUBUHL, FK
    [J]. HELVETICA PHYSICA ACTA, 1984, 57 (04): : 521 - 523
  • [3] Relaxation dynamics of SF6 studied by energy-resolved electron ion coincidence technique
    Stankiewicz, M
    Riu, JRI
    Ruiz, JA
    Erman, P
    Hatherly, P
    Kivimäki, A
    García, EM
    Rachlew, E
    [J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 2004, 137 : 369 - 375
  • [4] Spatially resolved mass spectrometry of reactive Ar/SF6/N2 plasma jets
    Arnold, T
    Grabovsky, S
    Schindler, A
    Wagner, HE
    [J]. SURFACE & COATINGS TECHNOLOGY, 2005, 200 (1-4): : 818 - 821
  • [5] Energy distribution of ions in an unbalanced magnetron plasma measured with energy-resolved mass spectrometry
    Kadlec, S
    Quaeyhaegens, C
    Knuyt, G
    Stals, LM
    [J]. SURFACE & COATINGS TECHNOLOGY, 1997, 89 (1-2): : 177 - 184
  • [6] INFLUENCE OF SF6 ON HF LASER-PLASMA PARAMETERS
    BAEVA, MG
    ATANASOV, PA
    [J]. NUOVO CIMENTO DELLA SOCIETA ITALIANA DI FISICA D-CONDENSED MATTER ATOMIC MOLECULAR AND CHEMICAL PHYSICS FLUIDS PLASMAS BIOPHYSICS, 1995, 17 (03): : 261 - 265
  • [7] TIME RESOLVED MASS-SPECTROMETRY ON THE TRANSIENT SF6 LIGHT-BEAM
    RUEGSEGGER, W
    SCHOTZAU, HJ
    KNEUBUHL, FK
    [J]. HELVETICA PHYSICA ACTA, 1982, 55 (05): : 587 - 590
  • [8] Ion energy distributions in SF6 plasmas at a radio-frequency powered electrode
    [J]. J Appl Phys, 1 (56):
  • [9] Ion energy distributions in SF6 plasmas at a radio-frequency powered electrode
    Becker, F
    Rangelow, IW
    Kassing, R
    [J]. JOURNAL OF APPLIED PHYSICS, 1996, 80 (01) : 56 - 65
  • [10] Energy-resolved x-ray and neutron diagnostics in tokamaks: Prospect for plasma parameters determination
    Jardin, A.
    Bielecki, J.
    Dabrowski, W.
    Drozdowicz, K.
    Dworak, D.
    Gerenton, V.
    Guibert, D.
    Kantor, R.
    Krol, K.
    Kulinska, A.
    Kurowski, A.
    Lach, B.
    Mazon, D.
    Savoye-Peysson, Y.
    Scholz, M.
    Walkowiak, J.
    Wiacek, U.
    Woznicka, U.
    [J]. PHYSICS OF PLASMAS, 2024, 31 (08)
123