Ion energy distributions in SF6 plasmas at a radio-frequency powered electrode

被引：0
|
作者：
机构：
来源：
J Appl Phys | / 1卷 / 56期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] Ion energy distributions in SF6 plasmas at a radio-frequency powered electrode
    Becker, F
    Rangelow, IW
    Kassing, R
    [J]. JOURNAL OF APPLIED PHYSICS, 1996, 80 (01) : 56 - 65
  • [2] Effect of electrode material on measured ion energy distributions in radio-frequency discharges
    [J]. 1600, American Inst of Physics, Woodbury, NY, USA (67):
  • [3] Charged particle densities and kinetics in a radio-frequency SF6 plasma
    Kono, A.
    Endo, M.
    Ohata, K.
    Kishimoto, T.
    Goto, T.
    [J]. Journal of Applied Physics, 1994, 76 (11):
  • [4] Langmuir probe characterization of low-frequency oscillations in a radio-frequency SF6 plasma
    Barlow, A. J.
    Deslandes, A.
    Quinton, J. S.
    [J]. PLASMA SOURCES SCIENCE & TECHNOLOGY, 2011, 20 (06):
  • [5] Positive ion energy and flux measurements in dual frequency SF6/O-2 plasmas
    Jaiprakash, VC
    Thompson, BE
    [J]. PROCEEDINGS OF THE ELEVENTH INTERNATIONAL SYMPOSIUM ON PLASMA PROCESSING, 1996, 96 (12): : 153 - 161
  • [6] Compact floating ion energy analyzer for measuring energy distributions of ions bombarding radio-frequency biased electrode surfaces
    Edelberg, EA
    Perry, A
    Benjamin, N
    Aydil, ES
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1999, 70 (06): : 2689 - 2698
  • [7] COMPARISON OF EXPERIMENTAL MEASUREMENTS AND MODEL PREDICTIONS FOR RADIO-FREQUENCY AR DISCHARGES AND SF6 DISCHARGES
    GOGOLIDES, E
    NICOLAI, JP
    SAWIN, HH
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03): : 1001 - 1006
  • [8] Vacuum ultraviolet emission from radio frequency plasmas of SF6 and CF4
    [J]. J Vac Sci Technol A, 4 (2102):
  • [9] Vacuum ultraviolet emission from radio frequency plasmas of SF6 and CF4
    Li, J
    McConkey, JW
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1996, 14 (04): : 2102 - 2105
  • [10] Optical and mass spectrometric investigations of ions and neutral species in SF6 radio-frequency discharges
    Foest, R
    Olthoff, JK
    VanBrunt, RJ
    Benck, EC
    Roberts, JR
    [J]. PHYSICAL REVIEW E, 1996, 54 (02): : 1876 - 1887
12345