Modification of metal Schottky contacts on silicon by ion implantation

被引：0
|
作者：
Malherbe, J.B. [1 ]
Friedland, E. [1 ]
Myburg, G. [1 ]
Carr, B.A. [1 ]
Bredell, L.J. [1 ]
Pavlovska, A. [1 ]
机构：
[1] Univ of Pretoria, South Africa
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1988年 / B35卷 / 3-4期
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摘要：
Silicon and Alloys
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页码：247 / 252
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