SUPERCONDUCTING PROPERTIES OF Nb AND NbN FILMS SYNTHESIZED BY rf CATHODE SPUTTERING.

被引:0
|
作者
Gershenzon, M.E.
Koshelets, V.P.
机构
来源
Soviet physics. Technical physics | 1980年 / 25卷 / 03期
关键词
FILMS - Preparation - NIOBIUM AND ALLOYS - Thin Films - NIOBIUM COMPOUNDS - Thin Films;
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学科分类号
摘要
The optimum conditions for synthesizing Nb and NbN films by rf cathode sputtering are investigated. The dependence of the critical temperature T//c on the film thickness which is observed for these films can be attributed to the proximity of the film to a surface layer with a relatively low value of T//c.
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页码:343 / 346
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