RADIATION-HARD INSULATOR FOR MOS LSI DEVICE ISOLATION.

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作者：
NEC, Kanagawa, Jpn, NEC, Kanagawa, Jpn [1 ]
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来源：
IEEE Trans Nucl Sci | 1985年 / 6卷
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Compilation and indexing terms; Copyright 2025 Elsevier Inc;
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摘要：
SEMICONDUCTOR DEVICE MANUFACTURE
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