Characterization of arclike Ti vapor plasma on the high-voltage electron-beam evaporator

被引：0

作者：

Kajioka, H. ^{[1
]}

机构：

[1] Western Hiroshima Prefecture, Industrial Research Inst, Kure, Japan

来源：

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1997年 / 15卷 / 05期

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引用

页码：2728 / 2739

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