Characterization of arclike Ti vapor plasma on the high-voltage electron-beam evaporator

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作者：
Kajioka, H. [1 ]
机构：
[1] Western Hiroshima Prefecture, Industrial Research Inst, Kure, Japan
来源：
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1997年 / 15卷 / 05期
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页码：2728 / 2739
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