Chemical vapour deposition and characterization of smooth {100}-faceted diamond films

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作者
Wild, C. [1 ]
Koidl, P. [1 ]
Mueller-Sebert, W. [1 ]
Walcher, H. [1 ]
Kohl, R. [1 ]
Herres, N. [1 ]
Locher, R. [1 ]
Samlenski, R. [1 ]
Brenn, R. [1 ]
机构
[1] Fraunhofer-Inst fuer Angewandte, Festkoerperphysik, Freiburg, Germany
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页码:158 / 168
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