Orthogonal experiment on the technological process of Ta/Al alloy thin-film

被引：0
|
作者：
Univ of Electronic Science and, Technology, Chengdu, China [1 ]
机构：
来源：
Gongneng Cailiao | / 4卷 / 364-366期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
(Edited Abstract)
引用
收藏
相关论文
共 50 条
  • [31] ORTHOGONAL THIN-FILM MAGNETOMETER USING THE ANISOTROPIC MAGNETORESISTANCE EFFECT
    DERIDDER, RM
    FLUITMAN, JH
    IEEE TRANSACTIONS ON MAGNETICS, 1984, 20 (05) : 960 - 962
  • [32] AMORPHOUS SILICON THIN-FILM TRANSISTOR - THEORY AND EXPERIMENT
    NEUDECK, GW
    MALHOTRA, AK
    SOLID-STATE ELECTRONICS, 1976, 19 (08) : 721 - 729
  • [33] The feasibility of using an Al-alloy film as the source/drain electrode in a microcrystalline silicon thin-film transistor
    Li, Jun
    Zhang, Xiao-Wen
    Zhang, Liang
    Lin, Hua-Ping
    Zhang, Hao
    Jiang, Xue-Yin
    Zhang, Zhi-Lin
    SOLID STATE COMMUNICATIONS, 2010, 150 (33-34) : 1560 - 1563
  • [34] THIN-FILM INTERACTIONS OF AL AND AL (CU) ON W AND TI
    KRAFCSIK, I
    PALMSTROM, CJ
    GYULAI, J
    COLGAN, E
    ZINGU, E
    MAYER, JW
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (03) : C102 - C102
  • [35] TECHNOLOGICAL ASPECTS OF THE DEVELOPMENT OF A THIN-FILM THERMAL PRINTHEAD.
    Buttler, W.
    International Journal of Microcircuits and Electronic Packaging, 1982, 5 (01): : 23 - 26
  • [36] High-performance polymer top-contact thin-film transistor with orthogonal photolithographic process
    Wang, Lu
    Cai, Kunlin
    Liu, Yu
    Xie, Yingtao
    MICROELECTRONICS JOURNAL, 2022, 127
  • [37] Effect of technological parameters on performance of Ta/Al alloy resistive films
    Dianzi Keji Daxue Xuebao/Journal of University of Electronic Science and Technology of China, 26 (05): : 492 - 491
  • [38] THIN-FILM TRANSFORMER FABRICATED BY A DRY PROCESS
    YACHI, T
    MINO, M
    TAGO, A
    YANAGISAWA, K
    NTT REVIEW, 1992, 4 (03): : 46 - 50
  • [39] Micromachining process for thin-film SMA actuators
    Nakamura, Y
    Nakamura, S
    Miyazaki, S
    ETFA '96 - 1996 IEEE CONFERENCE ON EMERGING TECHNOLOGIES AND FACTORY AUTOMATION, PROCEEDINGS, VOLS 1 AND 2, 1996, : 493 - 497
  • [40] INVESTIGATION OF PROCESS OF MNBI THIN-FILM REMAGNETIZATION
    SHUR, YS
    GLAZER, AA
    TAGIROV, RI
    POTAPOV, AP
    GASS, VG
    DOKLADY AKADEMII NAUK SSSR, 1973, 210 (04): : 822 - &
12345