Metallization studies on Ti3SiC2-based contacts on 6H-SiC

被引：0
|
作者：
Technische Universitaet Clausthal, Clausthal-Zellerfeld, Germany [1 ]
机构：
来源：
J Mater Sci Mater Electron | / 2卷 / 103-107期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] Metallization studies on Ti3SiC2-based contacts on 6H-SiC
    Goesmann, F
    Wenzel, R
    Schmid-Fetzer, R
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 1998, 9 (02) : 103 - 107
  • [2] Metallization studies on Ti3SiC2-based contacts on 6H-SiC
    F Goesmann
    R Wenzel
    R Schmid-FETZER
    Journal of Materials Science: Materials in Electronics, 1998, 9 : 103 - 107
  • [3] Microstructure of Ti3SiC2-based ceramics
    Morgiel, J
    Lis, J
    Pampuch, R
    MATERIALS LETTERS, 1996, 27 (03) : 85 - 89
  • [4] Polarity dependent Al-Ti contacts to 6H-SiC
    Veisz, B
    Pécz, B
    APPLIED SURFACE SCIENCE, 2004, 233 (1-4) : 360 - 365
  • [5] Study on the reverse characteristics of Ti/6H-SiC Schottky contacts
    Shang, YC
    Liu, ZL
    Wang, SR
    ACTA PHYSICA SINICA, 2003, 52 (01) : 211 - 216
  • [6] Rhenium ohmic contacts on 6H-SiC
    McDaniel, GY
    Fenstermaker, ST
    Lampert, WV
    Holloway, PH
    JOURNAL OF APPLIED PHYSICS, 2004, 96 (09) : 5357 - 5364
  • [7] ANNEALING OF SCHOTTKY CONTACTS ON 6H-SiC
    Machac, Petr
    Orna, Martin
    Cichon, Stanislav
    ELECTRONIC DEVICES AND SYSTEMS: IMAPS CS INTERNATIONAL CONFERENCE 2011, 2011, : 29 - 32
  • [8] Metal disilicide contacts to 6H-SiC
    Kriz, J
    Scholz, T
    Gottfried, K
    Leibelt, J
    Kaufmann, C
    Gessner, T
    SILICON CARBIDE, III-NITRIDES AND RELATED MATERIALS, PTS 1 AND 2, 1998, 264-2 : 775 - 778
  • [9] Ti and Ti/Sb ohmic contacts on n-type 6H-SiC
    Barda, Bohumil
    Machac, Petr
    Hubickova, Marie
    MICROELECTRONIC ENGINEERING, 2008, 85 (10) : 2022 - 2024
  • [10] Tribological Behavior of Ti3SiC2-based Material
    Zhimei SUN and Yanchun ZHOUShenyang National Laboratory for Materials Science
    Journal of Materials Science & Technology, 2002, (02) : 142 - 145
12345