RESEARCH PROGRESSES TOWARD A SELECTIVE MOS GAS SENSOR.

Semiconductor gas sensors, while offering advantages of small size, low cost, ruggedness, and chemical inertness, are not gas selective. Researchers have determined the mechanism by which gas detection occurs and have formulated a mathematical model which allows modification and prediction of sensor performance. Heightened concern for safety in fossil fuel recovery, synthetic fuel generation, and other industrial activities involving toxic gases is reflected in increased demand for a device which can monitor a growing number of potentially dangerous gases. In addition, there is an increased need for gas sensing devices for pollution monitoring and for operation of combustion processes at peak efficiency.