Preparation and crystallization of tin-doped and undoped amorphous indium oxide films deposited by sputtering

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作者：
Song, Pung Keun [1 ]
Akao, Hirotaka [1 ]
Kamei, Masayuki [1 ]
Shigesato, Yuzo [2 ]
Yasui, Itaru [1 ]
机构：
[1] Institute of Industrial Science, University of Tokyo, 7-22-1 Roppongi, Minato-ku, Tokyo 106-8558, Japan
[2] Department of Chemistry, College of Science and Engineering, Aoyama Gakuin University, 6-16-1, Chitosedai, Setagaya-ku, Tokyo 157-8572, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1999年 / 38卷 / 9 A期
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页码：5224 / 5226
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