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- [32] Enhanced performance of gate-first p-channel metal-insulator-semiconductor field-effect transistors with polycrystalline silicon/TiN/HfSiON stacks fabricated by physical vapor deposition based in situ method JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2007, 46 (45-49): : L1111 - L1113