Lifetime identification of thermal oxidation process induced contamination in silicon wafers

被引：0
|
作者：
Showa Denko K.K, Saitama, Japan [1 ]
机构：
来源：
Materials Science Forum | 1995年 / 196-201卷 / pt 4期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1817 / 1822
相关论文
共 50 条
  • [31] FLATTENING PROCESS OF SILICON WAFERS
    Dobrescu, Tiberiu
    Dorin, Alexandru
    ANNALS OF DAAAM FOR 2008 & PROCEEDINGS OF THE 19TH INTERNATIONAL DAAAM SYMPOSIUM, 2008, : 397 - 398
  • [32] The effect of backside films on Rapid Thermal Oxidation (RTO) growth on silicon wafers
    Omar, AB
    Ahmad, IB
    ICSE'98: 1998 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS, PROCEEDINGS, 1998, : 80 - 85
  • [33] Rapid thermal annealing and oxidation of silicon wafers with back-side films
    Fiory, AT
    RAPID THERMAL AND INTEGRATED PROCESSING VI, 1997, 470 : 49 - 56
  • [34] THERMAL OXIDATION OF SILICON AS AN IMPURITY CONTROLLED PROCESS
    REVESZ, AG
    EVANS, RJ
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1967, ED14 (11) : 789 - &
  • [35] Light-induced lifetime degradation of multicrystal line silicon wafers and solar cells
    Dhamrin, M
    Hashigami, H
    Saitoh, T
    POLYCRYSTALLINE SEMICONDUCTORS VII, PROCEEDINGS, 2003, 93 : 147 - 151
  • [36] Identification of colloidal silica polishing induced contamination in silicon
    Tweddle, D.
    Hamer, P.
    Shen, Z.
    Moody, M. P.
    Wilshaw, P. R.
    MATERIALS CHARACTERIZATION, 2019, 152 : 239 - 244
  • [37] Silicon contamination control by lifetime measurements
    Zoth, G
    Geyer, S
    Schulze, HJ
    ANALYTICAL AND DIAGNOSTIC TECHNIQUES FOR SEMICONDUCTOR MATERIALS, DEVICES, AND PROCESSES, 1999, 99 (16): : 5 - 20
  • [38] Aspects of silicon contamination control by lifetime
    Siemens AG, Semiconductors, Plant Regensburg, P.O.Box 100944, D-93009 Regensburg, Germany
    ASTM Special Technical Publication, 1998, (1340): : 30 - 44
  • [39] Aspects of silicon contamination control by lifetime
    Zoth, G
    RECOMBINATION LIFETIME MEASUREMENTS IN SILICON, 1998, 1340 : 30 - 44
  • [40] Dynamic photoluminescence lifetime imaging for the characterisation of silicon wafers
    Herlufsen, Sandra
    Ramspeck, Klaus
    Hinken, David
    Schmidt, Arne
    Mueller, Jens
    Bothe, Karsten
    Schmidt, Jan
    Brendel, Rolf
    PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 2011, 5 (01): : 25 - 27
12345