Dry Etching in Microelectronics: New Techniques for the Future Needs.

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作者：

Prud'Homme, Danielle ^{[1
]}

机构：

[1] EFCIS, Grenoble, Fr, EFCIS, Grenoble, Fr

来源：

Vide, les Couches Minces | 1983年 / 38卷 / 218期

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