EFFECT OF HYDROGEN DILUTION ON STRUCTURE OF a-Si:H PREPARED BY SUBSTRATE IMPEDANCE TUNING TECHNIQUE.

被引：0
|
作者：
Matsuo, Shinji [1 ]
Ueda, Masato [1 ]
Imura, Takeshi [1 ]
Osaka, Yukio [1 ]
机构：
[1] Hiroshima Univ, Higashi-Hiroshima, Jpn, Hiroshima Univ, Higashi-Hiroshima, Jpn
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes | 1988年 / 27卷 / 04期
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15
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页码：475 / 479
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